Effective sampling points are thickened by using a variable-speed scanning scheme, i.e., scanning speed is low at hole edge and fast in the center, thus both repeatability at X and Y directions of the central coordinate are less than 4 microns. 采用边缘慢、中部快的变速扫描方案,密化了有效采样点,使圆心坐标在X,Y方向的重复度均小于4μm。
The periodic variable-speed motion was needed in the mechanical scanning and driving system of microwave remote sensor. According to the controlling requirement of speed and position, a driving and controlling system was developed using the stepping motor as executive component. 针对存在周期性变速运动的微波遥感器机械扫描驱动系统,根据其扫描运动的速度、位置控制要求,采用步进电机做为执行元件研制开发了一套驱动控制系统。